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RZHANOV AND K. K. SVITASHEV ellipsometric angle values for a number of the reflecting system models and a set of the model parameters. Essentially, the results of calculation supply an experimenter with a set of hypotheses on the behavior of the ellipsometric angles in some specific situations. Comparing experimental results with those of calculation permits us to reject incorrect hypotheses and to create a model equivalent to the system under study. The matter of a model corresponding to the system under study being settled, ellipsometry becomes really a highly effective method for controlling the system parameters and can be successfully utilized when studying the changes of these parameters under the influence of various ambients.

K. SVITASHEV ellipsometric angle values for a number of the reflecting system models and a set of the model parameters. Essentially, the results of calculation supply an experimenter with a set of hypotheses on the behavior of the ellipsometric angles in some specific situations. Comparing experimental results with those of calculation permits us to reject incorrect hypotheses and to create a model equivalent to the system under study. The matter of a model corresponding to the system under study being settled, ellipsometry becomes really a highly effective method for controlling the system parameters and can be successfully utilized when studying the changes of these parameters under the influence of various ambients.

O where yp is the angle between the s direction and “transmission” direction of the polarizer. When turning from a polarizer to an analyzer, the angle yp transforms into yA, the angle between the s direction and “transmission” direction of the analyzer. (2) Reflecting system : + 9,” r i r,” - r i 0 + r; 0 r i - r i rz 0 0 2rsrp cos A - 0 0 -2r,rp sin A 2r,rp sin A A. V. RZHANOV A N D K. K. SVITASHEV 26 (3) A compensator (birefringent crystal plate) : -1 M(YC,J) = 0 0 0 o 6 1 - 2 sin2 yc sin22 6 -sin 4yc sin22 sin2yc sin 6 o 6 -sin 4yc sina 2 -0 -sin 2yc sin 6 1 6 1 - cos2 2yc sin2 - cos 2yc sin 6 2 - cos 2yc sin 6 cos 6 (80) where yc is the angle between the s direction and a “fast” axis of the comare the phase shifts pensator.

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